Industry Line Scan Confocal Microscope L Series--Simscop Instrument (Guangzhou) Co., Ltd

The line scan confocal microscope (L series) is a powerful imaging tool that combines confocal microscopy principles with fast linear scanning capabilities. This innovative technology has revolutionized the testing of rapid events in materials science and microelectronics. Unlike traditional confocal microscopes, which capture images pixel by pixel, the line scan confocal microscope captures entire rows of information simultaneously, providing unmatched speed in detection, making it ideal for quick industrial inspections.

The core of the high-speed line scan confocal microscope lies in its ability to scan a laser or illumination along a line through the sample while simultaneously collecting emitted fluorescence or reflected light from that same line. This technology is unaffected by the intensity of reflected light, enabling high-precision detection of nearly any material. It effectively addresses challenges in industrial inspection, such as evaluating transparent objects, highly reflective surfaces, and strongly light-absorbing materials, opening new avenues for industrial testing.

Features

High-speed acquisition 50fps@1024x1024 pixels.
Single wavelength laser supports 11 kinds of wavelength customization from UV to NIR.
Large FOV（60X: 0.36mm, 40X: 0.54mm.
Software function Large image Mosaic, 3D imaging rendering.
High-speed line scan 100mm/s（Linewidth 1mm.
3D depth of field fusion z-axis resolution 50nm.

Product Brochure

The line scan confocal microscope (L series) is a powerful imaging tool that combines confocal microscopy principles with fast linear scanning capabilities. This innovative technology has revolutionized the testing of rapid events in materials science and microelectronics. Unlike traditional confocal microscopes, which capture images pixel by pixel, the line scan confocal microscope captures entire rows of information simultaneously, providing unmatched speed in detection, making it ideal for quick industrial inspections.

The core of the high-speed line scan confocal microscope lies in its ability to scan a laser or illumination along a line through the sample while simultaneously collecting emitted fluorescence or reflected light from that same line. This technology is unaffected by the intensity of reflected light, enabling high-precision detection of nearly any material. It effectively addresses challenges in industrial inspection, such as evaluating transparent objects, highly reflective surfaces, and strongly light-absorbing materials, opening new avenues for industrial testing.

Features

High-speed acquisition 50fps@1024x1024 pixels.
Single wavelength laser supports 11 kinds of wavelength customization from UV to NIR.
Large FOV（60X: 0.36mm, 40X: 0.54mm.
Software function Large image Mosaic, 3D imaging rendering.
High-speed line scan 100mm/s（Linewidth 1mm.
3D depth of field fusion z-axis resolution 50nm.

Product Brochure

High-speed acquisition (50fps@1024x1024 pixel)

Line-scan confocal microscopy is over 100 times faster than traditional methods. It reduces phototoxicity and photobleaching, making it great for observing time-based changes, like metal microstructures at high temperatures, and for quick industrial tests, such as detecting nanomaterials and welding defects.

Accurate surface analysis and non-contact inspection

The line scan confocal microscope can accurately reconstruct the 3D images of material surfaces, making it suitable for measuring parameters such as surface roughness, microstructure, and coating thickness. It operates without contacting the sample, preventing physical damage, which is particularly advantageous for fragile, soft, or difficult-to-reach samples, such as semiconductor wafers, microelectronic devices, and high-precision optical components.

Perfect industry high-speed and high-resolution solution

The wafer defect detection system identifies physical and pattern defects on wafers, providing their location coordinates (X, Y). Line-scan confocal technology speeds up detection time by more than 10 times.

Line scanning speed: 100mm/s
Line width: 1mm
Defects can be detected on an 8-inch wafer in just 6 minutes

Detection speed reference

Camera	High-speed CCD
Pixels per line	4096 x 2
Pixels per line (Vertical)	8192
Pixel width mm	0.005
Linear array camera scan rate (lines/second)	200000
Magnification (dry objective)	10X	20X
NA	0.5
Imaging resolution nm: 0.61λ/NA	824	589
Scan time s:
Sample area / Scan area in 1s	397.3
Single wafer detection time	2min	6min37s

The theoretical ideal parameters are only for reference, and the effects of motor and data transmission should be considered in practice

Multiple customizable industrial vision inspection solutions Please contact us!

Software's UI & Function

Product specifications and Brochures

Parameter	L Series Industry
Laser unit	Standart wavelength：405nm±5nm
	Output way：Single-mode polarization-maintaining fiber coupling (TEM00)
	Single wavelength output power：＞20mW
	Power stability：<1%
	Spectrum Linewidth＜3nm
Detector	Line array scan camera; Resolution: 4096*2
	Pixel size: 7μm * 7μm
	Maximum line speed: 200kHz
	Pixel bit depth: 8/10/12bit
	Dynamic range ≥ 66.2dB
Scan module	Scan pixel: 100 x 100 ~ 2048 x 2048
	Frame rate: 50fps(1024x1024pixels)
	500fps(1024x100pixels) Speed scan mode
XY Resolution	＜500nm@20x Objective
Imaging depth	Standart scan module < 100um
Field of view	5x：1mmx1mm \| 10x：0.51mmx0.51mm \| 20x：0.26mmx0.26mm \|
Field of view	40x：0.13mmx0.13mm \| 60x：85umx85um \| 100x：51umx51um
Objective switch	Five-hole internal positioning converter, ball bearing internal positioning
Sample stage	Available with wafer vacuum fixture
	Table size: 270mm×170mm
	Electric XY repeated positioning accuracy: ±0.5um;
	Maximum speed: ≥100mm/s
	Table size ≥270x170mm
	Effective travel: > 250mm
	Maximum load capacity: > 1KG (horizontal)
Z-axis travel	Focusing resolution/minimum step size 0.5μm, repeated positioning accuracy +/-0.2μm, maximum stroke > 100um
Confocal structure	Coarse trimmer coaxial, equipped with limit device and locking device, low hand position coaxial focusing handwheel, trimmer handwheel grid value 1μm
Transmitting illumination system	Warm LED, continuously adjustable brightness
	LED knob brightness regulator
	Condenser: ultra-long working distance 72mm, numerical aperture NA=0.30, with three-hole phase lining ring plate
Software function	Z-stack data processing, large image Mosaic, image analysis, imaging data management, 3D topography rendering

Note: Available wavelength 375nm/445nm/473nm/515nm/525nm/532nm/ 633nm/660nm/685nm/785nm/808nm

Micro-LED Slice surface
morphology scanning

Micro-LED 3D Morphology detection

Micro LED Bonding gold wire depth chart

Micro LED Bonding gold wire
3D reconstruction

Mirco-LED-line scan result of gold line (raw picture)

Line-scan confocal microscopy provides high-resolution images of micro-LEDs, accurately revealing their light emission characteristics and surface structures.

It also highlights defects in gold wires and fine details of the LEDs by scanning line-by-line. This technique is essential for improving manufacturing processes, enhancing display performance, and solving optical issues in micro-LED technology.


High-speed line scan 8-inch wafer surface detection	High-speed detection of wafer surface defects	Wafer surface detection，20X Objective diameter of microcrater 5.5 μm diameter of defect 1.5 μm、 0.7 μm、0.65 μm	Wafer surface detection，20X Objective diameter of defects 1.1μm、0.9 μm、 0.9 μm、0.45 μm
Finish high-resolution and high-contarst imgaing detection in 50s (without post imaging processing)		High-speed line scan 6-inch wafer surface detection

Metal step

Sample depth map of metal step

3D morphology of metal samples

3D morphology analysis of metal samples

Metal surface detection

	4XObjective	10XObjective	20XObjective	40XObjective
Right
Reverse
The profiles of metal surface are clear under objectives with different magnification, capable of detecting metal surface defects.

High-speed line scan photovoltaic grid line surface morphology measurement

High resolution：Measure depth and width accurately, analyzing micro details.
Fast scan：One scan covers a large area, suitable for rapid detection of mass production.
Non-contact：Not damage sample to ensure the reliability of the measurement.
3D morphology reconstruction：Generate 3D structure of notching line for detection.
Automatic data process：Analize and generate report quickly, suitable for real-time quality control.
Complex surface adaptation：Good adaptability to different materials and complex surfaces.

Line-scan confocal microscopy enables high-resolution imaging of the surface morphology of photovoltaic grid lines, accurately detecting micro-defects, surface roughness, and shape irregularities. This detailed measurement helps optimize the manufacturing process of photovoltaic modules, improving efficiency, long-term stability, and ensuring high performance and reliability in real-world applications.

Applicable to various industrial fields, including semiconductors, materials science, and nanotechnology.

SIMSCOP L Series Confocal Microscope Software main Function

GUI Function Panel

Display Settings such as lasers/detectors are easy to identify

Microscope image acquisition parameter setting

Laser control panel

XYZ motor table scanning parameter setting

Camera parameter setting

SIMSCOP Multi Line CW

Single Mode Laser 2024V1